Mass spectrometry and ex-situ ellipsometry as analysis tools for plasma enhanced deposition of ZnO thin films

  • E.R. Kieft

Student thesis: Master

Abstract

Date of Award31 Aug 2001
Original languageEnglish
SupervisorR. Groenen (Supervisor 1), M.C.M. (Richard) van de Sanden (Supervisor 2) & J.L. Linden (External coach)

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