| Date of Award | 31 Oct 1997 |
|---|---|
| Original language | English |
| Supervisor | Ariël de Graaf (Supervisor 1), M.C.M. (Richard) van de Sanden (Supervisor 2) & Daan C. Schram (Supervisor 2) |
Injection of hydrogen-free carbon in Ar-N2 plasmas for the deposition of carbon nitride
Student thesis: Master