| Date of Award | 31 Aug 1997 |
|---|---|
| Original language | English |
| Supervisor | M.C.M. (Richard) van de Sanden (Supervisor 1), R.J. Severens (Supervisor 2), W.M.M. (Erwin) Kessels (Supervisor 2) & Daan C. Schram (Supervisor 2) |
In situ temperature and a-Si:H deposition measurements with a rotating compensator ellipsometer
Student thesis: Master