| Date of Award | Aug 2023 |
|---|---|
| Original language | English |
| Supervisor | Erik P.A.M. Bakkers (Supervisor 1), Mathijs G.C. Mientjes (Supervisor 2) & Xin Guan (Supervisor 2) |
Cite this
- Standard
In-situ deposition of high-κ dielectrics for nanowire gating applications
Student thesis: Master