In situ ATR-FTIR absorption spectroscopy on silicon thin films
: a study of silicon hydrides from surface to bulk

  • P.J. van den Oever

Student thesis: Master

Abstract

Date of Award31 Oct 2002
Original languageEnglish
SupervisorW.M.M. (Erwin) Kessels (Supervisor 1) & M.C.M. (Richard) van de Sanden (Supervisor 2)

Cite this

In situ ATR-FTIR absorption spectroscopy on silicon thin films: a study of silicon hydrides from surface to bulk
van den Oever, P. J. (Author). 31 Oct 2002

Student thesis: Master