In situ ATR-FTIR absorption spectroscopy on silicon thin films
: a study of silicon hydrides from surface to bulk

  • P.J. van den Oever

Student thesis: Master

Date of Award31 Oct 2002
Original languageEnglish
SupervisorW.M.M. (Erwin) Kessels (Supervisor 1) & M.C.M. (Richard) van de Sanden (Supervisor 2)

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