High-rate deep silicon etching with the Expanding Thermal Plasma technique

  • P.J.W. van Lankvelt

Student thesis: Master

Date of Award31 Mar 2006
Original languageEnglish
SupervisorM.A. Blauw (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & M.C.M. (Richard) van de Sanden (Supervisor 2)

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