Abstract
| Date of Award | 31 Mar 2006 |
|---|---|
| Original language | English |
| Supervisor | M.A. Blauw (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & M.C.M. (Richard) van de Sanden (Supervisor 2) |
High-rate deep silicon etching with the Expanding Thermal Plasma technique
Student thesis: Master