Functional analysis of retarding field energy analyzers for ion energy distribution measurements in plasma enhanced atomic layer deposition

  • Jan W. Buiter

Student thesis: Master

Abstract

Date of Award2018
Original languageEnglish
SupervisorKarsten Arts (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & Harm C.M. Knoops (Supervisor 2)

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