Functional analysis of retarding field energy analyzers for ion energy distribution measurements in plasma enhanced atomic layer deposition

  • Jan W. Buiter

Student thesis: Master

Abstract

Date of Award2018
Original languageEnglish
SupervisorKarsten Arts (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & Harm C.M. Knoops (Supervisor 2)

Cite this

Functional analysis of retarding field energy analyzers for ion energy distribution measurements in plasma enhanced atomic layer deposition
Buiter, J. W. (Author). 2018

Student thesis: Master