| Date of Award | 2018 |
|---|---|
| Original language | English |
| Supervisor | Karsten Arts (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & Harm C.M. Knoops (Supervisor 2) |
Functional analysis of retarding field energy analyzers for ion energy distribution measurements in plasma enhanced atomic layer deposition
Student thesis: Master