FTIR spectroscopy study on SiO2 particle synthesis by means of TEOS/O2-fed capacitively coupled plasma

  • D.J. Eijkman

Student thesis: Master

Abstract

Date of Award30 Apr 2003
Original languageEnglish
SupervisorG.R. Alcott (Supervisor 1), M. (Adriana) Creatore (Supervisor 2), J.L. Linden (External coach) & M.C.M. (Richard) van de Sanden (Supervisor 2)

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