| Date of Award | 29 Aug 2024 |
|---|---|
| Original language | English |
| Supervisor | Paul M.J. Van den Hof (Supervisor 1), E.M.M. (Lizan) Kivits (Supervisor 2), Amol A. Khalate (External coach) & Shilpa Joy (External coach) |
Fault detection and diagnosis of wafer scanners using dynamic network identification
Student thesis: Master