Experimental validation of exact plant inversion and signal decomposition feedforward control approaches for wafer positioning

  • Aditya Ferry Ardyanto

Student thesis: Master

Abstract

Date of Award31 Aug 2017
Original languageEnglish
SupervisorHans Butler (Supervisor 1), Marcel F. Heertjes (Supervisor 2), Yanin Kasemsinsup (Supervisor 2) & Siep Weiland (Supervisor 2)

Cite this

'