Experimental validation of exact plant inversion and signal decomposition feedforward control approaches for wafer positioning

  • Aditya Ferry Ardyanto

Student thesis: Master

Date of Award31 Aug 2017
Original languageEnglish
SupervisorHans Butler (Supervisor 1), Marcel F. Heertjes (Supervisor 2), Y. Kasemsinsup (Supervisor 2) & Siep Weiland (Supervisor 2)

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