| Date of Award | 31 Mar 2012 |
|---|---|
| Original language | English |
| Supervisor | H.B. Profijt (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2) |
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Energy-enhanced ALD for nano-manufacturing by Direct Spacer-Defined Double Patterning (D-SDDP)
Student thesis: Master