Energy-enhanced ALD for nano-manufacturing by Direct Spacer-Defined Double Patterning (D-SDDP)

  • R. Roelofs

Student thesis: Master

Abstract

Date of Award31 Mar 2012
Original languageEnglish
SupervisorH.B. Profijt (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2)

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