Dynamic vacuum feedthrough

: planar positioning in an ultra clean vacuum environment

  • G.A. van Erp

Student thesis: Master

Abstract

Date of Award2012
Original languageEnglish
SupervisorMaarten Steinbuch (Supervisor 1), P.C.J.N. (Nick) Rosielle (Supervisor 2), Johan P.M. Hoefnagels (Supervisor 2) & O.J. Seijger (External coach)

Cite this

Dynamic vacuum feedthrough: planar positioning in an ultra clean vacuum environment
van Erp, G. A. (Author). 2012

Student thesis: Master