| Date of Award | 2012 |
|---|---|
| Original language | English |
| Supervisor | Maarten Steinbuch (Supervisor 1), P.C.J.N. Rosielle (Supervisor 2), Johan P.M. Hoefnagels (Supervisor 2) & O.J. Seijger (External coach) |
Dynamic vacuum feedthrough: planar positioning in an ultra clean vacuum environment
Student thesis: Master