Abstract
Master thesis to investigate the intrinsic drift in the heterodyne double pass interferometer from VSL for sub-nanometer dimensional stability measurements.| Date of Award | 28 Nov 2024 |
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| Original language | English |
| Supervisor | L.F.P. (Pascal) Etman (Supervisor 1), Pieter Kappelhof (Supervisor 2) & Jo Spronck (Supervisor 2) |
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