| Date of Award | 2007 |
|---|---|
| Original language | English |
| Supervisor | M.C.M. (Richard) van de Sanden (Supervisor 1), M.C. Petcu (Supervisor 2) & M. (Adriana) Creatore (Supervisor 2) |
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Development of a novel electrostatic probe for ion flux measurements in Ar-NH3-SiH4 plasmas
Student thesis: Master