Development of a novel electrostatic probe for ion flux measurements in Ar-NH3-SiH4 plasmas

  • A.C. Bronneberg

Student thesis: Master

Date of Award2007
Original languageEnglish
SupervisorM.C.M. (Richard) van de Sanden (Supervisor 1), M.C. Petcu (Supervisor 2) & M. (Adriana) Creatore (Supervisor 2)

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  • 634474

    File: application/pdf, 1.36 MB

    Type: Thesis

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