Designing an in situ fast grating infrared spectroscope, and Argon-Oxygen plasma treatment of SiOxCyHz films

  • A. Klaver

Student thesis: Master

Abstract

Date of Award2001
Original languageEnglish
SupervisorM.F.A.M. van Hest (Supervisor 1) & M.C.M. (Richard) van de Sanden (Supervisor 2)

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