Design of an end-effector and docking mechanism for the EUV alpha-tool wafer handler

  • H.J.A. van de Sande

Student thesis: Master

Abstract

Date of Award31 May 2002
Original languageEnglish
SupervisorP.H.J. Schellekens (Supervisor 1), P.C.J.N. Rosielle (Supervisor 2) & J.P.M. Vermeulen (External coach)

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