Design of an Electromagnetic Deformable Mirror for EUV

Abstract

For the next generation of EUV lithography machines, replacing one or more of the existing passive aspherical mirrors with dynamically deformable mirrors is seen as one of the paths to further increasing performance. In this thesis, research is done to verify whether a deformable mirror system using discrete electromagnetic actuators is feasible, what a proposed design would look like, and what its performance could be. A framework for analyzing system performance, depending on geometries and system layouts, has been established, and the theoretical performance of such a system is determined. The same framework is used to examine the sensitivity of system performance to different types of errors and disturbances. A proposed design using 151 open-loop controlled tubular Lorentz-type actuators is shown and different design approaches used to limit disturbing effects to an acceptable minimum are described.

Date of Award	29 Sept 2022
Original language	English