Design of a short stroke actuator for the ATLAS reticle stage

  • A. de Klerk

Student thesis: Master

Abstract

Date of Award31 Aug 1997
Original languageEnglish
SupervisorJ.C. Compter (Supervisor 1) & A.T.A. Peijnenburg (Supervisor 2)

Cite this

Design of a short stroke actuator for the ATLAS reticle stage
de Klerk, A. (Author). 31 Aug 1997

Student thesis: Master