| Date of Award | 31 Dec 1996 |
|---|---|
| Original language | English |
| Supervisor | Daan C. Schram (Supervisor 1), M.C.M. (Richard) van de Sanden (Supervisor 2) & Gottlieb S. Oehrlein (External coach) |
Cite this
- Standard
Deposition and etching in inductively coupled fluorocarbon plasmas
Student thesis: Master