| Date of Award | 31 Aug 1991 |
|---|---|
| Original language | Dutch |
| Supervisor | R.J.M.M. Snijkers (Supervisor 1) |
De ionen-energieverdeling op de elektroden in een CF4 RF-plasma
Student thesis: Master
Student thesis: Master
| Date of Award | 31 Aug 1991 |
|---|---|
| Original language | Dutch |
| Supervisor | R.J.M.M. Snijkers (Supervisor 1) |