Controlling the lateral distribution of thickness during deposition of thin films with sub nanometer precision

  • M.J.H. Kessels

Student thesis: Master

Abstract

Date of Award31 Aug 2001
Original languageEnglish
SupervisorMarnix J. van der Wiel (Supervisor 1), Fred Bijkerk (External coach), O.J. (Jom) Luiten (Supervisor 2), Leo J. van IJzendoorn (Supervisor 2) & Paul M. Koenraad (Supervisor 2)

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Controlling the lateral distribution of thickness during deposition of thin films with sub nanometer precision
Kessels, M. J. H. (Author). 31 Aug 2001

Student thesis: Master