Controlling the lateral distribution of thickness during deposition of thin films with sub nanometer precision

  • M.J.H. Kessels

Student thesis: Master


Date of Award31 Aug 2001
Original languageEnglish
SupervisorM.J. van der Wiel (Supervisor 1), Fred Bijkerk (External coach), O.J. (Jom) Luiten (Supervisor 2), Leo J. van IJzendoorn (Supervisor 2) & Paul M. Koenraad (Supervisor 2)

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