| Date of Award | 31 Aug 2001 |
|---|---|
| Original language | English |
| Supervisor | M.J. van der Wiel (Supervisor 1), Fred Bijkerk (External coach), O.J. (Jom) Luiten (Supervisor 2), Leo J. van IJzendoorn (Supervisor 2) & Paul M. Koenraad (Supervisor 2) |
Controlling the lateral distribution of thickness during deposition of thin films with sub nanometer precision
Student thesis: Master