Comparison of a capacitive and an interferometric wafer geometry measurement method

  • Maurice C.P. Setton

Student thesis: Master

Abstract

Date of Award31 Aug 2004
Original languageEnglish
SupervisorP.H.J. Schellekens (Supervisor 1) & M.J. Jansen (Supervisor 2)

Cite this

Comparison of a capacitive and an interferometric wafer geometry measurement method
Setton, M. C. P. (Author). 31 Aug 2004

Student thesis: Master