Chemical vapour deposition : the deposition of tungsten and aluminium nitride

  • H.T. Mollen

Student thesis: Master

Abstract

Date of Award29 Feb 1988
Original languageEnglish
SupervisorR. Metselaar (Supervisor 1), L.R. Wolff (Supervisor 1), G. Verspui (External coach) & J. Smits (External coach)

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