| Date of Award | 31 Aug 1997 |
|---|---|
| Original language | English |
| Supervisor | M.C.M. (Richard) van de Sanden (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2), Daan C. Schram (Supervisor 2) & A.E. Kaloyeros (External coach) |
Chemical vapor deposition of copper on thin diffusion barrier layers
Student thesis: Master