Characterization of precursor blocking during area-selective ALD
: Studied with probe molecules and infrared spectroscopy

  • Roy H.J. Clevis

Student thesis: Master

Date of Award11 Jun 2021
Original languageEnglish
SupervisorAdrie J.M. Mackus (Supervisor 1), Jun Li (Supervisor 2) & Marc J.M. Merkx (Supervisor 2)

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