Characterization of implantation damage caused by low energy (0.1-10keV) implantation of 11B

  • M.A.J. Heijdra

Student thesis: Master

Abstract

Date of Award31 Jul 1997
Original languageEnglish
SupervisorMartien J.A. de Voigt (Supervisor 1), Y. Tamminga (External coach), Leo J. van IJzendoorn (Supervisor 2), R.G. van Welzenis (Supervisor 2) & Peter H.A. Mutsaers (Supervisor 2)

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