Characterization of freestanding thin film properties for RF-MEMS

  • V. Burg

Student thesis: Master

Abstract

Date of Award30 Jun 2006
Original languageEnglish
SupervisorJaap M.J. den Toonder (Supervisor 1), Auke R. van Dijken (External coach), Johan P.M. Hoefnagels (Supervisor 2) & Marc G.D. Geers (Supervisor 2)

Cite this

Characterization of freestanding thin film properties for RF-MEMS
Burg, V. (Author). 30 Jun 2006

Student thesis: Master