Abstract
| Date of Award | 30 Jun 2006 |
|---|---|
| Original language | English |
| Supervisor | Jaap M.J. den Toonder (Supervisor 1), Auke R. van Dijken (External coach), Johan P.M. Hoefnagels (Supervisor 2) & Marc G.D. Geers (Supervisor 2) |
Characterization of freestanding thin film properties for RF-MEMS
Student thesis: Master