Characterising the noble metal ALD process
: in situ FT-IR measurements of ALD deposited Pt nanoparticles

  • J.M.M. Huijs

Student thesis: Bachelor

Date of Award2014
Original languageEnglish
SupervisorR.H.E.C. Bosch (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2)

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