Characterising the noble metal ALD process
: in situ FT-IR measurements of ALD deposited Pt nanoparticles

  • J.M.M. Huijs

Student thesis: Bachelor

Abstract

Date of Award2014
Original languageEnglish
Supervisor Roger H.E.C. Bosch (Supervisor 1) & W.M.M. (Erwin) Kessels (Supervisor 2)

Cite this

Characterising the noble metal ALD process: in situ FT-IR measurements of ALD deposited Pt nanoparticles
Huijs, J. M. M. (Author). 2014

Student thesis: Bachelor