Characterisation of interfacial strength of low-k dielectric materials used in ICs

  • M.H.M. Kouters

Student thesis: Master

Abstract

Date of Award31 Aug 2006
Original languageEnglish
SupervisorMarc G.D. Geers (Supervisor 1), Jaap M.J. den Toonder (Supervisor 2), Ron H.J. Peerlings (Supervisor 2), B.A.E. van Hal (Supervisor 2) & R.B.R. van Silfhout (Supervisor 2)

Cite this

Characterisation of interfacial strength of low-k dielectric materials used in ICs
Kouters, M. H. M. (Author). 31 Aug 2006

Student thesis: Master