Characterisation of interfacial strength of low-k dielectric materials used in ICs

  • M.H.M. Kouters

Student thesis: Master

Date of Award31 Aug 2006
Original languageEnglish
SupervisorMarc G.D. Geers (Supervisor 1), Jaap M.J. den Toonder (Supervisor 2), Ron H.J. Peerlings (Supervisor 2), B.A.E. van Hal (Supervisor 2) & R.B.R. van Silfhout (Supervisor 2)

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