Characterisation of an inductively coupled plasma source for silicon nitride deposition

  • B.J. Kniknie

Student thesis: Master

Date of Award31 Aug 2005
Original languageEnglish
SupervisorM.C.M. (Richard) van de Sanden (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & Roeland C.M. Bosch (External coach)

Cite this

Documents

  • full text

    File: application/pdf, 29.1 MB

    Type: Thesis

'