Characterisation of an inductively coupled plasma source for silicon nitride deposition

  • B.J. Kniknie

Student thesis: Master

Abstract

Date of Award31 Aug 2005
Original languageEnglish
SupervisorM.C.M. (Richard) van de Sanden (Supervisor 1), W.M.M. (Erwin) Kessels (Supervisor 2) & Roeland C.M. Bosch (External coach)

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Characterisation of an inductively coupled plasma source for silicon nitride deposition
Kniknie, B. J. (Author). 31 Aug 2005

Student thesis: Master