| Date of Award | 31 Aug 2000 |
|---|---|
| Original language | English |
| Supervisor | W.M.M. (Erwin) Kessels (Supervisor 1), Maarten G.H. Boogaarts (Supervisor 2), M.C.M. (Richard) van de Sanden (Supervisor 2) & Daan C. Schram (Supervisor 2) |
Cite this
- Standard
Cavity ringdown study of the densities and kinetics of SiHx radicals in a remote SiH4 plasma
Student thesis: Master