Cavity ringdown study of the densities and kinetics of SiHx radicals in a remote SiH4 plasma

Student thesis: Master

Abstract

Date of Award31 Aug 2000
Original languageEnglish
SupervisorW.M.M. (Erwin) Kessels (Supervisor 1), Maarten G.H. Boogaarts (Supervisor 2), M.C.M. (Richard) van de Sanden (Supervisor 2) & Daan C. Schram (Supervisor 2)

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Cavity ringdown study of the densities and kinetics of SiHx radicals in a remote SiH4 plasma
Hoefnagels, J. P. M. (Author). 31 Aug 2000

Student thesis: Master