Cavity ringdown study of the densities and kinetics of SiHx radicals in a remote SiH4 plasma

Student thesis: Master

Abstract

Date of Award31 Aug 2000
LanguageEnglish
SupervisorErwin Kessels (Supervisor 1), Maarten G.H. Boogaarts (Supervisor 2), Richard van de Sanden (Supervisor 2) & Daan Schram (Supervisor 2)

Cite this

Cavity ringdown study of the densities and kinetics of SiHx radicals in a remote SiH4 plasma
Hoefnagels, J. P. M. (Author). 31 Aug 2000

Student thesis: Master