Beam quality determination methods for focused ion beams

  • K.E.M. Penterman

Student thesis: Master

Abstract

Date of Award2019
Original languageEnglish
SupervisorEdgar J.D. Vredenbregt (Supervisor 1), Steinar Wouters (External coach) & Gijs ten Haaf (External coach)

Cite this

Beam quality determination methods for focused ion beams
Penterman, K. E. M. (Author). 2019

Student thesis: Master