Atomic layer deposition of In2O3
: growth, morphology and hydrogen doping

  • D. Vanhemel

Student thesis: Master

Date of Award31 Mar 2015
Original languageEnglish
SupervisorY. Wu (Supervisor 1), F. Roozeboom (Supervisor 2) & W.M.M. (Erwin) Kessels (Supervisor 2)

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