| Date of Award | 30 Jun 1988 |
|---|---|
| Original language | English |
| Supervisor | H.L. Hagedoorn (Supervisor 1), J. Coolsen (External coach) & S. Wittekoek (External coach) |
Cite this
- Standard
Aspects of the illumination and projection system of the ASM-Lithography PAS 2500 wafer stepper
Student thesis: Master