Area-Selective Deposition of Ruthenium by Atomic Layer Deposition and Etching

  • Hairui Chen

Student thesis: Master

Date of AwardJun 2020
Original languageEnglish
SupervisorAdrie J.M. Mackus (Supervisor 1), Marcel A. Verheijen (Supervisor 2) & Martijn F.J. Vos (Supervisor 1)

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    File: application/pdf, 27.7 MB

    Type: Thesis

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