Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles

  • Rick G.J. Jongen

Student thesis: Master

Abstract

Date of Award2018
Original languageEnglish
SupervisorMarc J.M. Merkx (Supervisor 1) & Adrie J.M. Mackus (Supervisor 2)

Cite this

Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles
Jongen, R. G. J. (Author). 2018

Student thesis: Master