Date of Award | 2019 |
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Original language | English |
Supervisor | Marc J.M. Merkx (Supervisor 1) & Alfredo Mameli (External coach) |
Area-selective atomic layer deposition of Al2O3
Student thesis: Master
Student thesis: Master
Date of Award | 2019 |
---|---|
Original language | English |
Supervisor | Marc J.M. Merkx (Supervisor 1) & Alfredo Mameli (External coach) |