Area-selective atomic layer deposition of Al2O3

  • A. Angelidis

Student thesis: Master

Abstract

Date of Award2019
Original languageEnglish
SupervisorMarc J.M. Merkx (Supervisor 1) & Alfredo Mameli (External coach)

Cite this

Area-selective atomic layer deposition of Al2O3
Angelidis, A. (Author). 2019

Student thesis: Master