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An experimental-numerical study of metal peel off in the Cu/low-k back-end structure of integrated circuits

  • RenĂ© Kregting

Student thesis: Master

Date of Award2006
Original languageEnglish
SupervisorMarc G.D. Geers (Supervisor 1), Ron H.J. Peerlings (Supervisor 2) & Willem D. van Driel (External coach)

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