Active damping for charge driven piezoelectric nanopositioning stage using self sensing control

  • R. Di Filippo

Student thesis: Master

Abstract

Date of Award19 Sep 2018
Original languageEnglish
SupervisorSiep Weiland (Supervisor 1), Hans Butler (Supervisor 2), B. Jansen (External coach) & Ruben Vandervelden (External coach)

Cite this

'