A study of the Boltzmann equation in the glow of a radio frequency CF4/Ar discharges

  • A.J. Smits

Student thesis: Master

Abstract

Date of Award31 Mar 1988
Original languageEnglish
SupervisorP.M. Vallinga (Supervisor 1), F.J. de Hoog (Supervisor 2) & P.M. Meijer (Supervisor 2)

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