A dynamic model of a nanopositioning MEMS stage

  • L. van der Maas

Student thesis: Master

Abstract

Date of Award10 Oct 2018
Original languageEnglish
SupervisorRob H.B. Fey (Supervisor 1), Henk Nijmeijer (Supervisor 2), Hamed Sadeghian Marnani (Supervisor 2), R.J.F. Bijster (External coach) & J.J.B. (Benjamin) Biemond (External coach)

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