Zirconia thin film preparation by wet chemical methods at low temperature

M. Popovici, J. Graaf, de, M.A. Verschuuren, P.C.J. Graat, M.A. Verheijen

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In this study the preparation of zirconia thin films with a high refractive index at low temperature is aimed for. Two non-hydrolytic type approaches of wet chemical synthesis are presented. Both by sol–gel and colloid chemistry, highly transmissive, smooth thin films of zirconia cubic and/or tetragonal crystalline phases were readily prepared after annealing at only 400 °C. The thin films show indices of refraction varying between 1.7 and 1.9 for annealing temperatures in the range 200–400 °C.
Original languageEnglish
Pages (from-to)630-634
Number of pages5
JournalThin Solid Films
Issue number2
Publication statusPublished - 2010


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