Zirconia thin film preparation by wet chemical methods at low temperature

M. Popovici; J. Graaf, de; M.A. Verschuuren; P.C.J. Graat; M.A. Verheijen

doi:10.1016/j.tsf.2010.08.015

Zirconia thin film preparation by wet chemical methods at low temperature

M. Popovici, J. Graaf, de, M.A. Verschuuren, P.C.J. Graat, M.A. Verheijen

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Abstract

In this study the preparation of zirconia thin films with a high refractive index at low temperature is aimed for. Two non-hydrolytic type approaches of wet chemical synthesis are presented. Both by sol–gel and colloid chemistry, highly transmissive, smooth thin films of zirconia cubic and/or tetragonal crystalline phases were readily prepared after annealing at only 400 °C. The thin films show indices of refraction varying between 1.7 and 1.9 for annealing temperatures in the range 200–400 °C.

Original language	English
Pages (from-to)	630-634
Number of pages	5
Journal	Thin Solid Films
Volume	519
Issue number	2
DOIs	https://doi.org/10.1016/j.tsf.2010.08.015
Publication status	Published - 2010

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title = "Zirconia thin film preparation by wet chemical methods at low temperature",

abstract = "In this study the preparation of zirconia thin films with a high refractive index at low temperature is aimed for. Two non-hydrolytic type approaches of wet chemical synthesis are presented. Both by sol–gel and colloid chemistry, highly transmissive, smooth thin films of zirconia cubic and/or tetragonal crystalline phases were readily prepared after annealing at only 400 °C. The thin films show indices of refraction varying between 1.7 and 1.9 for annealing temperatures in the range 200–400 °C.",

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T1 - Zirconia thin film preparation by wet chemical methods at low temperature

AU - Popovici, M.

AU - Graaf, de, J.

AU - Verschuuren, M.A.

AU - Graat, P.C.J.

AU - Verheijen, M.A.

PY - 2010

Y1 - 2010

N2 - In this study the preparation of zirconia thin films with a high refractive index at low temperature is aimed for. Two non-hydrolytic type approaches of wet chemical synthesis are presented. Both by sol–gel and colloid chemistry, highly transmissive, smooth thin films of zirconia cubic and/or tetragonal crystalline phases were readily prepared after annealing at only 400 °C. The thin films show indices of refraction varying between 1.7 and 1.9 for annealing temperatures in the range 200–400 °C.

AB - In this study the preparation of zirconia thin films with a high refractive index at low temperature is aimed for. Two non-hydrolytic type approaches of wet chemical synthesis are presented. Both by sol–gel and colloid chemistry, highly transmissive, smooth thin films of zirconia cubic and/or tetragonal crystalline phases were readily prepared after annealing at only 400 °C. The thin films show indices of refraction varying between 1.7 and 1.9 for annealing temperatures in the range 200–400 °C.

U2 - 10.1016/j.tsf.2010.08.015

DO - 10.1016/j.tsf.2010.08.015

M3 - Article

SN - 0040-6090

VL - 519

SP - 630

EP - 634

JO - Thin Solid Films

JF - Thin Solid Films

IS - 2

ER -

Zirconia thin film preparation by wet chemical methods at low temperature

Abstract

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