XFACT : a furnace analysis and characterization tool

R.C.K. Kumar, J. Pineda de Gyvez

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    Abstract

    The diffusion furnace is one the most important and complex process equipment in the process line and efforts towards characterizing it will be well worth the effort. A CAM package for wafer temperature map reconstruction using only a few sampled data points is proposed. The software is completely generic and has no affiliation to any make of furnace. The data required for simulation can easily be obtained from the actual piece of equipment. Interpolation techniques with high accuracy are used for developing the temperature contours inside the furnace using a modified version of the Lagrange's interpolation technique
    Original languageEnglish
    Pages (from-to)84-87
    Number of pages4
    JournalIEEE Transactions on Semiconductor Manufacturing
    Volume8
    Issue number1
    DOIs
    Publication statusPublished - 1995

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