X-ray diffraction from quantum wires and quantum dots

Y. Zhuang, J. Stangl, A.A. Darhuber, G. Bauer, P. Mikulik, V. Holy, N. Darowski, U. Pietsch

    Research output: Contribution to journalArticleAcademicpeer-review

    3 Citations (SciVal)


    From the distribution of the scattered intensity in reciprocal space, information on the shape as well as on the strain distribution in nanostructured samples can be obtained. This is exemplified by applying this method to laterally patterned periodic Si/SiGe superlattices as well as to periodic SiGe dot arrays embedded in Si.
    Original languageEnglish
    Pages (from-to)215-221
    Number of pages7
    JournalJournal of Materials Science: Materials in Electronics
    Issue number3
    Publication statusPublished - 1999


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