WF6-CVD tungsten film as an emitter for a thermionic energy converter I. Production, texture and morphology of WF6-CVD tungsten films

G.H.M. Gubbels, L.R. Wolff, R. Metselaar

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

The as-deposited WF6-CVD tungsten film consists of columnar grains about 3 µm in diameter and about 30 µm in length. The film has a 100 fiber texture with a clear tendency to the formation of a pseudo-mono-crystal. The overwhelming part of the grains have their 100 axes within 27° of the surface normal. The as-deposited film surface consists of {111} crystal planes. Two hours annealing at 2273 K resulted in grain growth leading to a grain diameter of more than 70 µm. Inspection of etch pits revealed that 62% of the surface area consists of grains which have their 100 axis within 16° of the surface normal.
Original languageEnglish
Pages (from-to)193-199
Number of pages7
JournalApplied Surface Science
Volume40
Issue number3
DOIs
Publication statusPublished - 1989

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