TY - JOUR
T1 - Wavelength- and energy-dispersive Electron Probe Microanalysis (EPMA) measurements with non-perpendicular incidence of the electron beam
AU - Bastin, G.F.
AU - Oberndorff, P.J.T.L.
AU - Heijligers, H.J.M.
AU - Dijkstra, J.M.
PY - 2006
Y1 - 2006
N2 - A database of 416 wavelength- and energy-dispersive EPMA measurements on tilted specimens of NiAl, TiO2 and Ti3Al is presented. The analyses were performed between 10 and 30 kV and the tilt angles were varied between 0° and 60° in seven steps. The necessary hardware modifications for the specimen holder are discussed, as well as the various focusing techniques used in the measurements. A comparison between the experimental data, the calculations of our proza96t program and the results of Monte Carlo simulations shows that up to 50° tilt the predictions of our software are more than satisfactory. At larger tilt angles some deviations become noticeable. The Monte Carlo simulations appear to produce deviations at a somewhat earlier stage already, for reasons as yet unknown.
AB - A database of 416 wavelength- and energy-dispersive EPMA measurements on tilted specimens of NiAl, TiO2 and Ti3Al is presented. The analyses were performed between 10 and 30 kV and the tilt angles were varied between 0° and 60° in seven steps. The necessary hardware modifications for the specimen holder are discussed, as well as the various focusing techniques used in the measurements. A comparison between the experimental data, the calculations of our proza96t program and the results of Monte Carlo simulations shows that up to 50° tilt the predictions of our software are more than satisfactory. At larger tilt angles some deviations become noticeable. The Monte Carlo simulations appear to produce deviations at a somewhat earlier stage already, for reasons as yet unknown.
U2 - 10.1111/j.1365-2818.2006.01662.x
DO - 10.1111/j.1365-2818.2006.01662.x
M3 - Article
SN - 0022-2720
VL - 224
SP - 52
EP - 57
JO - Journal of Microscopy
JF - Journal of Microscopy
IS - 1
ER -