| Original language | English |
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| Supervisors/Advisors |
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| Award date | 1 Jan 2009 |
| Place of Publication | Eindhoven |
| Publisher | |
| Print ISBNs | 978-90-444-0851-5 |
| Publication status | Published - 2009 |
Wafer-level capping of MEMS devices
K. Seetharaman
Research output: Thesis › EngD Thesis