Wafer-level capping of MEMS devices

K. Seetharaman

Research output: ThesisEngD Thesis

Original languageEnglish
Supervisors/Advisors
  • Nötzel, Richard, Supervisor
  • Magnee, Peter H.C., External supervisor, External person
Award date1 Jan 2009
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-444-0851-5
Publication statusPublished - 2009

Bibliographical note

Eindverslag

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