Wafer-level capping of MEMS devices

K. Seetharaman, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

Research output: Thesis › Pd Eng Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Nötzel, Richard, Supervisor Magnee, Peter H.C., External supervisor, External person
Award date	1 Jan 2009
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-444-0851-5
Publication status	Published - 2009

Eindverslag

Cite this

@phdthesis{04dd3aa87489441dbe0e4ca598a0815c,

title = "Wafer-level capping of MEMS devices",

author = "K. Seetharaman and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)}",

note = "Eindverslag",

year = "2009",

language = "English",

isbn = "978-90-444-0851-5",

publisher = "Technische Universiteit Eindhoven",

}