Wafer-level capping of MEMS devices

K. Seetharaman, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • Nötzel, Richard, Supervisor
    • Magnee, Peter H.C., External supervisor, External person
    Award date1 Jan 2009
    Place of PublicationEindhoven
    Publisher
    Print ISBNs978-90-444-0851-5
    Publication statusPublished - 2009

    Bibliographical note

    Eindverslag

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